Effects of Surface Treatments on Interfacial Self-Cleaning in Atomic Layer Deposition of Al2O3 on InSb.
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| Title: | Effects of Surface Treatments on Interfacial Self-Cleaning in Atomic Layer Deposition of Al2O3 on InSb. |
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| Authors: | Hou, C. H., Chen, M. C., Chang, C. H. |
| Source: | Journal of the Electrochemical Society; 2008, Vol. 155 Issue 9, pG180-G183, 4p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00134651 |
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| DOI: | 10.1149/1.2948386 |
