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Effects of Surface Treatments on Interfacial Self-Cleaning in Atomic Layer Deposition of Al2O3 on InSb.

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Bibliographic Details
Title: Effects of Surface Treatments on Interfacial Self-Cleaning in Atomic Layer Deposition of Al2O3 on InSb.
Authors: Hou, C. H., Chen, M. C., Chang, C. H.
Source: Journal of the Electrochemical Society; 2008, Vol. 155 Issue 9, pG180-G183, 4p
Database: Applied Science & Technology Source
FullText Text:
  Availability: 0
Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 501543305
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: Effects of Surface Treatments on Interfacial Self-Cleaning in Atomic Layer Deposition of Al2O3 on InSb.
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  Data: <searchLink fieldCode="AU" term="%22Hou%2C+C%2E+H%2E%22">Hou, C. H.</searchLink><br /><searchLink fieldCode="AU" term="%22Chen%2C+M%2E+C%2E%22">Chen, M. C.</searchLink><br /><searchLink fieldCode="AU" term="%22Chang%2C+C%2E+H%2E%22">Chang, C. H.</searchLink>
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  Data: <searchLink fieldCode="JN" term="%22Journal+of+the+Electrochemical+Society%22">Journal of the Electrochemical Society</searchLink>; 2008, Vol. 155 Issue 9, pG180-G183, 4p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=501543305
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1149/1.2948386
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 4
        StartPage: G180
    Titles:
      – TitleFull: Effects of Surface Treatments on Interfacial Self-Cleaning in Atomic Layer Deposition of Al2O3 on InSb.
        Type: main
  BibRelationships:
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      – PersonEntity:
          Name:
            NameFull: Hou, C. H.
      – PersonEntity:
          Name:
            NameFull: Chen, M. C.
      – PersonEntity:
          Name:
            NameFull: Chang, C. H.
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          Dates:
            – D: 01
              M: 09
              Text: 2008
              Type: published
              Y: 2008
          Identifiers:
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              Value: 00134651
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              Value: 155
            – Type: issue
              Value: 9
          Titles:
            – TitleFull: Journal of the Electrochemical Society
              Type: main
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