Technologies for Cofabricating MEMS and Electronics.
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| Title: | Technologies for Cofabricating MEMS and Electronics. |
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| Authors: | Fedder, Gary K., Howe, Roger T., Liu, Tsu-Jae King |
| Source: | Proceedings of the IEEE; February 2008, Vol. 96 Issue 2, p306-322, 17p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00189219 |
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| DOI: | 10.1109/JPROC.2007.911064 |
