APA (7th ed.) Citation

Fedder, G. K., Howe, R. T., & Liu, T. K. (2008). Technologies for Cofabricating MEMS and Electronics. Proceedings of the IEEE, 96(2), 306. https://doi.org/10.1109/JPROC.2007.911064

Chicago Style (17th ed.) Citation

Fedder, Gary K., Roger T. Howe, and Tsu-Jae King Liu. "Technologies for Cofabricating MEMS and Electronics." Proceedings of the IEEE 96, no. 2 (2008): 306. https://doi.org/10.1109/JPROC.2007.911064.

MLA (9th ed.) Citation

Fedder, Gary K., et al. "Technologies for Cofabricating MEMS and Electronics." Proceedings of the IEEE, vol. 96, no. 2, 2008, p. 306, https://doi.org/10.1109/JPROC.2007.911064.