Deposition and characterization of titania-silica optical multilayers by asymmetric bipolar pulsed dc sputtering of oxide targets.
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| Title: | Deposition and characterization of titania-silica optical multilayers by asymmetric bipolar pulsed dc sputtering of oxide targets. |
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| Authors: | Sagdeo, P. R., Shinde, D. D., Misal, J. S. |
| Source: | Journal of Physics: D Applied Physics; February 3 2010, Vol. 43 Issue 4, p045302-1-045302-11, 11p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00223727 |
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| DOI: | 10.1088/0022-3727/43/4/045302 |
