Future beam-controlled processing technologies for microelectronics.
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| Title: | Future beam-controlled processing technologies for microelectronics. |
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| Authors: | Kern, Dieter P., Kuech, Thomas F., Oprysko, Modest M. |
| Source: | Science; 8/19/88 Supplement, Vol. 241, p936-944, 9p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00368075 |
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| DOI: | 10.1126/science.241.4868.936 |
