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Future beam-controlled processing technologies for microelectronics.

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Bibliographic Details
Title: Future beam-controlled processing technologies for microelectronics.
Authors: Kern, Dieter P., Kuech, Thomas F., Oprysko, Modest M.
Source: Science; 8/19/88 Supplement, Vol. 241, p936-944, 9p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 501575064
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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Items – Name: Title
  Label: Title
  Group: Ti
  Data: Future beam-controlled processing technologies for microelectronics.
– Name: Author
  Label: Authors
  Group: Au
  Data: <searchLink fieldCode="AU" term="%22Kern%2C+Dieter+P%2E%22">Kern, Dieter P.</searchLink><br /><searchLink fieldCode="AU" term="%22Kuech%2C+Thomas+F%2E%22">Kuech, Thomas F.</searchLink><br /><searchLink fieldCode="AU" term="%22Oprysko%2C+Modest+M%2E%22">Oprysko, Modest M.</searchLink>
– Name: TitleSource
  Label: Source
  Group: Src
  Data: <searchLink fieldCode="JN" term="%22Science%22">Science</searchLink>; 8/19/88 Supplement, Vol. 241, p936-944, 9p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=501575064
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1126/science.241.4868.936
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 9
        StartPage: 936
    Titles:
      – TitleFull: Future beam-controlled processing technologies for microelectronics.
        Type: main
  BibRelationships:
    HasContributorRelationships:
      – PersonEntity:
          Name:
            NameFull: Kern, Dieter P.
      – PersonEntity:
          Name:
            NameFull: Kuech, Thomas F.
      – PersonEntity:
          Name:
            NameFull: Oprysko, Modest M.
    IsPartOfRelationships:
      – BibEntity:
          Dates:
            – D: 19
              M: 09
              Text: 8/19/88 Supplement
              Type: published
              Y: 1988
          Identifiers:
            – Type: issn-print
              Value: 00368075
          Numbering:
            – Type: volume
              Value: 241
          Titles:
            – TitleFull: Science
              Type: main
ResultId 1