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A laser-generated plasma source for x-ray lithography and VLSI.

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Bibliographic Details
Title:	A laser-generated plasma source for x-ray lithography and VLSI.
Authors:	Michette, A. G., Rogoyski, A. M., Burge, R. E.
Source:	Journal of Physics. E, Scientific Instruments.; October 1988, Vol. 21, p959-965, 7p
Database:	Applied Science & Technology Source

Description
ISSN:	00223735
DOI:	10.1088/0022-3735/21/10/011