Compositional dependent thin film stress states.
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| Title: | Compositional dependent thin film stress states. |
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| Authors: | Fu, B., Thompson, G. B. |
| Source: | Journal of Applied Physics; Oct2010, Vol. 108 Issue 4, p043506-1-043506-6, 6p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00218979 |
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| DOI: | 10.1063/1.3462431 |
