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Compositional dependent thin film stress states.

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Bibliographic Details
Title: Compositional dependent thin film stress states.
Authors: Fu, B., Thompson, G. B.
Source: Journal of Applied Physics; Oct2010, Vol. 108 Issue 4, p043506-1-043506-6, 6p
Database: Applied Science & Technology Source
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PubType: Academic Journal
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        Value: 10.1063/1.3462431
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        Text: English
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        PageCount: 6
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            NameFull: Fu, B.
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              Text: Oct2010
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              Y: 2010
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