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Hybrid RF-MEMS Switches Realized in SOI Wafers by Bulk Micromachining.

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Bibliographic Details
Title: Hybrid RF-MEMS Switches Realized in SOI Wafers by Bulk Micromachining.
Authors: Aharon, Oren, Gal, Lior, Nemirovsky, Yael
Source: Journal of Microelectromechanical Systems; October 2010, Vol. 19 Issue 5, p1162-1174, 13p
Database: Applied Science & Technology Source
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DbLabel: Applied Science & Technology Source
An: 501687439
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
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PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=501687439
RecordInfo BibRecord:
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      – Type: doi
        Value: 10.1109/JMEMS.2010.2067438
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      – Code: eng
        Text: English
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      Pagination:
        PageCount: 13
        StartPage: 1162
    Titles:
      – TitleFull: Hybrid RF-MEMS Switches Realized in SOI Wafers by Bulk Micromachining.
        Type: main
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            NameFull: Aharon, Oren
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            NameFull: Gal, Lior
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            NameFull: Nemirovsky, Yael
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            – D: 01
              M: 10
              Text: October 2010
              Type: published
              Y: 2010
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              Value: 19
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              Value: 5
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            – TitleFull: Journal of Microelectromechanical Systems
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