Hybrid RF-MEMS Switches Realized in SOI Wafers by Bulk Micromachining.
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| Title: | Hybrid RF-MEMS Switches Realized in SOI Wafers by Bulk Micromachining. |
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| Authors: | Aharon, Oren, Gal, Lior, Nemirovsky, Yael |
| Source: | Journal of Microelectromechanical Systems; October 2010, Vol. 19 Issue 5, p1162-1174, 13p |
| Database: | Applied Science & Technology Source |
| ISSN: | 10577157 |
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| DOI: | 10.1109/JMEMS.2010.2067438 |
