Numerical simulation of temperature distributions during electron beam annealing of multilayer semiconductor structures.
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| Title: | Numerical simulation of temperature distributions during electron beam annealing of multilayer semiconductor structures. |
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| Authors: | Meglicki, Z., Sumich, R. J., Faraone, L. |
| Source: | Journal of Applied Physics; June 1 1990, Vol. 67, p7050-7058, 9p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00218979 |
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| DOI: | 10.1063/1.345053 |
