APA (7th ed.) Citation

Meglicki, Z., Sumich, R. J., & Faraone, L. (1990). Numerical simulation of temperature distributions during electron beam annealing of multilayer semiconductor structures. Journal of Applied Physics, 67, 7050. https://doi.org/10.1063/1.345053

Chicago Style (17th ed.) Citation

Meglicki, Z., R. J. Sumich, and L. Faraone. "Numerical Simulation of Temperature Distributions During Electron Beam Annealing of Multilayer Semiconductor Structures." Journal of Applied Physics 67 (1990): 7050. https://doi.org/10.1063/1.345053.

MLA (9th ed.) Citation

Meglicki, Z., et al. "Numerical Simulation of Temperature Distributions During Electron Beam Annealing of Multilayer Semiconductor Structures." Journal of Applied Physics, vol. 67, 1990, p. 7050, https://doi.org/10.1063/1.345053.