View in EDS

Numerical simulation of temperature distributions during electron beam annealing of multilayer semiconductor structures.

Saved in:
Bibliographic Details
Title: Numerical simulation of temperature distributions during electron beam annealing of multilayer semiconductor structures.
Authors: Meglicki, Z., Sumich, R. J., Faraone, L.
Source: Journal of Applied Physics; June 1 1990, Vol. 67, p7050-7058, 9p
Database: Applied Science & Technology Source
FullText Text:
  Availability: 0
Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 501758440
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
IllustrationInfo
Items – Name: Title
  Label: Title
  Group: Ti
  Data: Numerical simulation of temperature distributions during electron beam annealing of multilayer semiconductor structures.
– Name: Author
  Label: Authors
  Group: Au
  Data: <searchLink fieldCode="AU" term="%22Meglicki%2C+Z%2E%22">Meglicki, Z.</searchLink><br /><searchLink fieldCode="AU" term="%22Sumich%2C+R%2E+J%2E%22">Sumich, R. J.</searchLink><br /><searchLink fieldCode="AU" term="%22Faraone%2C+L%2E%22">Faraone, L.</searchLink>
– Name: TitleSource
  Label: Source
  Group: Src
  Data: <searchLink fieldCode="JN" term="%22Journal+of+Applied+Physics%22">Journal of Applied Physics</searchLink>; June 1 1990, Vol. 67, p7050-7058, 9p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=501758440
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1063/1.345053
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 9
        StartPage: 7050
    Titles:
      – TitleFull: Numerical simulation of temperature distributions during electron beam annealing of multilayer semiconductor structures.
        Type: main
  BibRelationships:
    HasContributorRelationships:
      – PersonEntity:
          Name:
            NameFull: Meglicki, Z.
      – PersonEntity:
          Name:
            NameFull: Sumich, R. J.
      – PersonEntity:
          Name:
            NameFull: Faraone, L.
    IsPartOfRelationships:
      – BibEntity:
          Dates:
            – D: 01
              M: 06
              Text: June 1 1990
              Type: published
              Y: 1990
          Identifiers:
            – Type: issn-print
              Value: 00218979
          Numbering:
            – Type: volume
              Value: 67
          Titles:
            – TitleFull: Journal of Applied Physics
              Type: main
ResultId 1