Deep level transient spectroscopy characterization of tungsten-related deep levels in silicon.
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| Title: | Deep level transient spectroscopy characterization of tungsten-related deep levels in silicon. |
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| Authors: | Boughaba, S., Mathiot, D. |
| Source: | Journal of Applied Physics; January 1 1991, Vol. 69, p278-283, 6p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00218979 |
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| DOI: | 10.1063/1.347708 |