Behavior of SiNx films as masks for Zn diffusion.
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| Title: | Behavior of SiNx films as masks for Zn diffusion. |
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| Authors: | Zou, W. X., Vawter, G. A., Merz, J. L. |
| Source: | Journal of Applied Physics; August 1 1987, Vol. 62, p828-831, 4p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00218979 |
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| DOI: | 10.1063/1.339714 |
