Behavior of SiNx films as masks for Zn diffusion.
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| Title: | Behavior of SiNx films as masks for Zn diffusion. |
|---|---|
| Authors: | Zou, W. X., Vawter, G. A., Merz, J. L. |
| Source: | Journal of Applied Physics; August 1 1987, Vol. 62, p828-831, 4p |
| Database: | Applied Science & Technology Source |
| FullText | Text: Availability: 0 |
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| Header | DbId: aci DbLabel: Applied Science & Technology Source An: 501901090 AccessLevel: 2 PubType: Academic Journal PubTypeId: academicJournal PreciseRelevancyScore: 0 |
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| Items | – Name: Title Label: Title Group: Ti Data: Behavior of SiNx films as masks for Zn diffusion. – Name: Author Label: Authors Group: Au Data: <searchLink fieldCode="AU" term="%22Zou%2C+W%2E+X%2E%22">Zou, W. X.</searchLink><br /><searchLink fieldCode="AU" term="%22Vawter%2C+G%2E+A%2E%22">Vawter, G. A.</searchLink><br /><searchLink fieldCode="AU" term="%22Merz%2C+J%2E+L%2E%22">Merz, J. L.</searchLink> – Name: TitleSource Label: Source Group: Src Data: <searchLink fieldCode="JN" term="%22Journal+of+Applied+Physics%22">Journal of Applied Physics</searchLink>; August 1 1987, Vol. 62, p828-831, 4p |
| PLink | https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=501901090 |
| RecordInfo | BibRecord: BibEntity: Identifiers: – Type: doi Value: 10.1063/1.339714 Languages: – Code: eng Text: English PhysicalDescription: Pagination: PageCount: 4 StartPage: 828 Titles: – TitleFull: Behavior of SiNx films as masks for Zn diffusion. Type: main BibRelationships: HasContributorRelationships: – PersonEntity: Name: NameFull: Zou, W. X. – PersonEntity: Name: NameFull: Vawter, G. A. – PersonEntity: Name: NameFull: Merz, J. L. IsPartOfRelationships: – BibEntity: Dates: – D: 01 M: 08 Text: August 1 1987 Type: published Y: 1987 Identifiers: – Type: issn-print Value: 00218979 Numbering: – Type: volume Value: 62 Titles: – TitleFull: Journal of Applied Physics Type: main |
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