Electrochemical profiling of ion-implanted InP.

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Bibliographic Details
Title: Electrochemical profiling of ion-implanted InP.
Authors: Bahir, G., Merz, J. L., Abelson, J. R.
Source: Journal of the Electrochemical Society; September 1987, Vol. 134, p2187-2193, 7p
Database: Applied Science & Technology Source
Description
ISSN:00134651
DOI:10.1149/1.2100849