Plasma etching of Ti in fluorine-containing feeds.
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| Title: | Plasma etching of Ti in fluorine-containing feeds. |
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| Authors: | d'Agostino, R., Fracassi, F., Pacifico, C. |
| Source: | Journal of Applied Physics; January 1 1992, Vol. 71, p462-471, 10p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00218979 |
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| DOI: | 10.1063/1.350679 |
