Determination of the interface charge between an epilayer and a substrate using capacitance-voltage measurements.
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| Title: | Determination of the interface charge between an epilayer and a substrate using capacitance-voltage measurements. |
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| Authors: | Goren, D., Amir, N., Nemirovsky, Y. |
| Source: | Journal of Applied Physics; January 1 1992, Vol. 71, p318-325, 8p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00218979 |
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| DOI: | 10.1063/1.350709 |