Determination of the interface charge between an epilayer and a substrate using capacitance-voltage measurements.

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Bibliographic Details
Title: Determination of the interface charge between an epilayer and a substrate using capacitance-voltage measurements.
Authors: Goren, D., Amir, N., Nemirovsky, Y.
Source: Journal of Applied Physics; January 1 1992, Vol. 71, p318-325, 8p
Database: Applied Science & Technology Source
Description
ISSN:00218979
DOI:10.1063/1.350709