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Plasma-assisted etching of tungsten films: a quartz-crystal microbalance study.

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Bibliographic Details
Title: Plasma-assisted etching of tungsten films: a quartz-crystal microbalance study.
Authors: Fracassi, F., Coburn, J. W., 1932-
Source: Journal of Applied Physics; March 1 1988, Vol. 63, p1758-1761, 4p
Database: Applied Science & Technology Source
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