On the role of fluorine in BF2+ implanted silicon.
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| Title: | On the role of fluorine in BF2+ implanted silicon. |
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| Authors: | Virdi, G. S., Rauthan, C. M. S., Pathak, B. C. |
| Source: | Solid-State Electronics; April 1992, Vol. 35, p535-540, 6p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00381101 |
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| DOI: | 10.1016/0038-1101(92)90117-U |
