View in EDS

On the role of fluorine in BF2+ implanted silicon.

Saved in:
Bibliographic Details
Title: On the role of fluorine in BF2+ implanted silicon.
Authors: Virdi, G. S., Rauthan, C. M. S., Pathak, B. C.
Source: Solid-State Electronics; April 1992, Vol. 35, p535-540, 6p
Database: Applied Science & Technology Source
Be the first to leave a comment!
You must be logged in first