View in EDS

Phosphorous and arsenic doping of epitaxial silicon films in the 1000° to 1200°C temperature range.

Saved in:
Bibliographic Details
Title: Phosphorous and arsenic doping of epitaxial silicon films in the 1000° to 1200°C temperature range.
Authors: Swanson, T. B., Tucker, R. N.
Source: Journal of the Electrochemical Society; September 1969, Vol. 116, p1271-1274, 4p
Database: Applied Science & Technology Source
FullText Text:
  Availability: 0
Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 516729041
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
IllustrationInfo
Items – Name: Title
  Label: Title
  Group: Ti
  Data: Phosphorous and arsenic doping of epitaxial silicon films in the 1000° to 1200°C temperature range.
– Name: Author
  Label: Authors
  Group: Au
  Data: <searchLink fieldCode="AU" term="%22Swanson%2C+T%2E+B%2E%22">Swanson, T. B.</searchLink><br /><searchLink fieldCode="AU" term="%22Tucker%2C+R%2E+N%2E%22">Tucker, R. N.</searchLink>
– Name: TitleSource
  Label: Source
  Group: Src
  Data: <searchLink fieldCode="JN" term="%22Journal+of+the+Electrochemical+Society%22">Journal of the Electrochemical Society</searchLink>; September 1969, Vol. 116, p1271-1274, 4p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=516729041
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1149/1.2412296
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 4
        StartPage: 1271
    Titles:
      – TitleFull: Phosphorous and arsenic doping of epitaxial silicon films in the 1000° to 1200°C temperature range.
        Type: main
  BibRelationships:
    HasContributorRelationships:
      – PersonEntity:
          Name:
            NameFull: Swanson, T. B.
      – PersonEntity:
          Name:
            NameFull: Tucker, R. N.
    IsPartOfRelationships:
      – BibEntity:
          Dates:
            – D: 01
              M: 09
              Text: September 1969
              Type: published
              Y: 1969
          Identifiers:
            – Type: issn-print
              Value: 00134651
          Numbering:
            – Type: volume
              Value: 116
          Titles:
            – TitleFull: Journal of the Electrochemical Society
              Type: main
ResultId 1