Properties of molybdenum silicide film deposited by chemical vapor deposition.
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| Title: | Properties of molybdenum silicide film deposited by chemical vapor deposition. |
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| Authors: | Inoue, S. |
| Source: | Journal of the Electrochemical Society; July 1983, Vol. 130, p1603-1607, 5p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00134651 |
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| DOI: | 10.1149/1.2120042 |
