Observation of electron beam damage in thin-film SiO2 on Si with scanning Auger electron microscope.
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| Title: | Observation of electron beam damage in thin-film SiO2 on Si with scanning Auger electron microscope. |
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| Authors: | Ichimura, S., Shimizu, R. |
| Source: | Journal of Applied Physics; September 1979, Vol. 50, p6020-6022, 3p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00218979 |
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| DOI: | 10.1063/1.326677 |
