Phosphorus-doped molybdenum silicide films for LSI applications.
Saved in:
| Title: | Phosphorus-doped molybdenum silicide films for LSI applications. |
|---|---|
| Authors: | Inoue, S. |
| Source: | Journal of the Electrochemical Society; November 1981, Vol. 128, p2402-2410, 9p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00134651 |
|---|---|
| DOI: | 10.1149/1.2127259 |
