AC Bipolar Pulsed Power Supply for Reactive Magnetron Sputtering.
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| Title: | AC Bipolar Pulsed Power Supply for Reactive Magnetron Sputtering. |
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| Authors: | Garcia-Garcia, J., Pacheco-Sotelo, J., Valdivia-Barrientos, R. |
| Source: | IEEE Transactions on Plasma Science; October 1 2011, Vol. 39 Issue 10, p1983-1989, 7p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00933813 |
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| DOI: | 10.1109/TPS.2011.2162592 |
