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AC Bipolar Pulsed Power Supply for Reactive Magnetron Sputtering.

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Bibliographic Details
Title: AC Bipolar Pulsed Power Supply for Reactive Magnetron Sputtering.
Authors: Garcia-Garcia, J., Pacheco-Sotelo, J., Valdivia-Barrientos, R.
Source: IEEE Transactions on Plasma Science; October 1 2011, Vol. 39 Issue 10, p1983-1989, 7p
Database: Applied Science & Technology Source
FullText Text:
  Availability: 0
Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 525564259
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: AC Bipolar Pulsed Power Supply for Reactive Magnetron Sputtering.
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  Data: <searchLink fieldCode="AU" term="%22Garcia-Garcia%2C+J%2E%22">Garcia-Garcia, J.</searchLink><br /><searchLink fieldCode="AU" term="%22Pacheco-Sotelo%2C+J%2E%22">Pacheco-Sotelo, J.</searchLink><br /><searchLink fieldCode="AU" term="%22Valdivia-Barrientos%2C+R%2E%22">Valdivia-Barrientos, R.</searchLink>
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  Data: <searchLink fieldCode="JN" term="%22IEEE+Transactions+on+Plasma+Science%22">IEEE Transactions on Plasma Science</searchLink>; October 1 2011, Vol. 39 Issue 10, p1983-1989, 7p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=525564259
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1109/TPS.2011.2162592
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 7
        StartPage: 1983
    Titles:
      – TitleFull: AC Bipolar Pulsed Power Supply for Reactive Magnetron Sputtering.
        Type: main
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      – PersonEntity:
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            NameFull: Garcia-Garcia, J.
      – PersonEntity:
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            NameFull: Pacheco-Sotelo, J.
      – PersonEntity:
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            NameFull: Valdivia-Barrientos, R.
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            – D: 01
              M: 10
              Text: October 1 2011
              Type: published
              Y: 2011
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              Value: 39
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              Value: 10
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            – TitleFull: IEEE Transactions on Plasma Science
              Type: main
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