Al-Doped Zinc Oxide Film Deposition in Function of Power by AC Bipolar Pulse in Reactive Magnetron Sputtering.
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| Title: | Al-Doped Zinc Oxide Film Deposition in Function of Power by AC Bipolar Pulse in Reactive Magnetron Sputtering. |
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| Authors: | Garcia-Garcia, J., Pacheco-Sotelo, J., Valdivia-Barrientos, R., Rivera-Rodriguez, C., Pacheco-Pacheco, M., Gonzalez, Jean-Jacques, Soria-Arguello, G., Nieto-Perez, M. |
| Source: | IEEE Transactions on Plasma Science; Nov2011 Part 3 Part 3, Vol. 39 Issue 11, p2484-2485, 2p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00933813 |
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| DOI: | 10.1109/TPS.2011.2160368 |
