Effects of low temperature preannealing on ion-implant assisted intermixing of Si1-xGex/Si quantum wells.
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| Title: | Effects of low temperature preannealing on ion-implant assisted intermixing of Si1-xGex/Si quantum wells. |
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| Authors: | Labrie, D., Aers, G. C., Lafontaine, H., Williams, R. L., Charbonneau, S., Goldberg, R. D., Mitchell, I. V. |
| Source: | Applied Physics Letters; 12/16/1996, Vol. 69 Issue 25, p3866, 3p, 3 Graphs |
| Database: | Applied Science & Technology Source |
| ISSN: | 00036951 |
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| DOI: | 10.1063/1.117131 |
