Cycle time effects on growth and transistor characteristics of spatial atomic layer deposition of zinc oxide.
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| Title: | Cycle time effects on growth and transistor characteristics of spatial atomic layer deposition of zinc oxide. |
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| Authors: | Nelson, Shelby F.1, Levy, David H.1, Tutt, Lee W.1, Burberry, Mitchell1 |
| Source: | Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; Jan2012, Vol. 30 Issue 1, p01A154, 6p |
| Database: | Applied Science & Technology Source |
| ISSN: | 07342101 |
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| DOI: | 10.1116/1.3670878 |
