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Cycle time effects on growth and transistor characteristics of spatial atomic layer deposition of zinc oxide.

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Title: Cycle time effects on growth and transistor characteristics of spatial atomic layer deposition of zinc oxide.
Authors: Nelson, Shelby F.1, Levy, David H.1, Tutt, Lee W.1, Burberry, Mitchell1
Source: Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; Jan2012, Vol. 30 Issue 1, p01A154, 6p
Database: Applied Science & Technology Source
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  Availability: 0
Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 70166648
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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Items – Name: Title
  Label: Title
  Group: Ti
  Data: Cycle time effects on growth and transistor characteristics of spatial atomic layer deposition of zinc oxide.
– Name: Author
  Label: Authors
  Group: Au
  Data: <searchLink fieldCode="AU" term="%22Nelson%2C+Shelby+F%2E%22">Nelson, Shelby F.</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Levy%2C+David+H%2E%22">Levy, David H.</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Tutt%2C+Lee+W%2E%22">Tutt, Lee W.</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Burberry%2C+Mitchell%22">Burberry, Mitchell</searchLink><relatesTo>1</relatesTo>
– Name: TitleSource
  Label: Source
  Group: Src
  Data: <searchLink fieldCode="JN" term="%22Journal+of+Vacuum+Science+%26+Technology%3A+Part+A-Vacuums%2C+Surfaces+%26+Films%22">Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films</searchLink>; Jan2012, Vol. 30 Issue 1, p01A154, 6p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=70166648
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1116/1.3670878
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 6
        StartPage: 01A154
    Titles:
      – TitleFull: Cycle time effects on growth and transistor characteristics of spatial atomic layer deposition of zinc oxide.
        Type: main
  BibRelationships:
    HasContributorRelationships:
      – PersonEntity:
          Name:
            NameFull: Nelson, Shelby F.
      – PersonEntity:
          Name:
            NameFull: Levy, David H.
      – PersonEntity:
          Name:
            NameFull: Tutt, Lee W.
      – PersonEntity:
          Name:
            NameFull: Burberry, Mitchell
    IsPartOfRelationships:
      – BibEntity:
          Dates:
            – D: 01
              M: 01
              Text: Jan2012
              Type: published
              Y: 2012
          Identifiers:
            – Type: issn-print
              Value: 07342101
          Numbering:
            – Type: volume
              Value: 30
            – Type: issue
              Value: 1
          Titles:
            – TitleFull: Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films
              Type: main
ResultId 1