Improvement in performance and reliability with CF4 plasma pretreatment on the buffer oxide layer for low-temperature polysilicon thin-film transistor.
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| Title: | Improvement in performance and reliability with CF4 plasma pretreatment on the buffer oxide layer for low-temperature polysilicon thin-film transistor. |
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| Authors: | Ching-Lin Fan1,2, clfan@mail.ntust.edu.tw, Yi-Yan Lin1, Chun-Chieh Yang1 |
| Source: | Semiconductor Science & Technology; Mar2012, Vol. 27 Issue 3, p035005-035005, 1p, 1 Diagram, 2 Charts, 6 Graphs |
| Database: | Applied Science & Technology Source |
| ISSN: | 02681242 |
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| DOI: | 10.1088/0268-1242/27/3/035005 |
