APA (7th ed.) Citation

Fan, C., Lin, Y., & Yang, C. (2012). Improvement in performance and reliability with CF4 plasma pretreatment on the buffer oxide layer for low-temperature polysilicon thin-film transistor. Semiconductor Science & Technology, 27(3), 035005. https://doi.org/10.1088/0268-1242/27/3/035005

Chicago Style (17th ed.) Citation

Fan, Ching-Lin, Yi-Yan Lin, and Chun-Chieh Yang. "Improvement in Performance and Reliability with CF4 Plasma Pretreatment on the Buffer Oxide Layer for Low-temperature Polysilicon Thin-film Transistor." Semiconductor Science & Technology 27, no. 3 (2012): 035005. https://doi.org/10.1088/0268-1242/27/3/035005.

MLA (9th ed.) Citation

Fan, Ching-Lin, et al. "Improvement in Performance and Reliability with CF4 Plasma Pretreatment on the Buffer Oxide Layer for Low-temperature Polysilicon Thin-film Transistor." Semiconductor Science & Technology, vol. 27, no. 3, 2012, p. 035005, https://doi.org/10.1088/0268-1242/27/3/035005.