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Improvement in performance and reliability with CF4 plasma pretreatment on the buffer oxide layer for low-temperature polysilicon thin-film transistor.

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Title: Improvement in performance and reliability with CF4 plasma pretreatment on the buffer oxide layer for low-temperature polysilicon thin-film transistor.
Authors: Ching-Lin Fan1,2, clfan@mail.ntust.edu.tw, Yi-Yan Lin1, Chun-Chieh Yang1
Source: Semiconductor Science & Technology; Mar2012, Vol. 27 Issue 3, p035005-035005, 1p, 1 Diagram, 2 Charts, 6 Graphs
Database: Applied Science & Technology Source
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  Availability: 0
Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 71547084
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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Items – Name: Title
  Label: Title
  Group: Ti
  Data: Improvement in performance and reliability with CF4 plasma pretreatment on the buffer oxide layer for low-temperature polysilicon thin-film transistor.
– Name: Author
  Label: Authors
  Group: Au
  Data: <searchLink fieldCode="AU" term="%22Ching-Lin+Fan%22">Ching-Lin Fan</searchLink><relatesTo>1,2</relatesTo>, <i>clfan@mail.ntust.edu.tw</i><br /><searchLink fieldCode="AU" term="%22Yi-Yan+Lin%22">Yi-Yan Lin</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Chun-Chieh+Yang%22">Chun-Chieh Yang</searchLink><relatesTo>1</relatesTo>
– Name: TitleSource
  Label: Source
  Group: Src
  Data: <searchLink fieldCode="JN" term="%22Semiconductor+Science+%26+Technology%22">Semiconductor Science & Technology</searchLink>; Mar2012, Vol. 27 Issue 3, p035005-035005, 1p, 1 Diagram, 2 Charts, 6 Graphs
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=71547084
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1088/0268-1242/27/3/035005
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 1
        StartPage: 035005
    Titles:
      – TitleFull: Improvement in performance and reliability with CF4 plasma pretreatment on the buffer oxide layer for low-temperature polysilicon thin-film transistor.
        Type: main
  BibRelationships:
    HasContributorRelationships:
      – PersonEntity:
          Name:
            NameFull: Ching-Lin Fan
      – PersonEntity:
          Name:
            NameFull: Yi-Yan Lin
      – PersonEntity:
          Name:
            NameFull: Chun-Chieh Yang
    IsPartOfRelationships:
      – BibEntity:
          Dates:
            – D: 01
              M: 03
              Text: Mar2012
              Type: published
              Y: 2012
          Identifiers:
            – Type: issn-print
              Value: 02681242
          Numbering:
            – Type: volume
              Value: 27
            – Type: issue
              Value: 3
          Titles:
            – TitleFull: Semiconductor Science & Technology
              Type: main
ResultId 1