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Direct engraving on positive resists by synchrotron radiation.

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Bibliographic Details
Title: Direct engraving on positive resists by synchrotron radiation.
Authors: Ichimura, S.1, Hirata, M.1, Tanino, H.1, Atoda, N.1, Ono, M.1, Hoh, K.1
Source: Journal of Vacuum Science & Technology: Part B-Microelectronics Processing & Phenomena; 1983, Vol. 1 Issue 4, p1076-1079, 4p
Database: Applied Science & Technology Source
Description
ISSN:0734211X
DOI:10.1116/1.582636