Proposals and experiments on large area exposure in synchrotron radiation lithography.
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| Title: | Proposals and experiments on large area exposure in synchrotron radiation lithography. |
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| Authors: | Tanino, H.1, Hoh, K.1, Hirata, M.1, Atoda, N.1, Ichimura, S.1 |
| Source: | Journal of Vacuum Science & Technology: Part B-Microelectronics Processing & Phenomena; 1985, Vol. 3 Issue 1, p232-236, 5p |
| Database: | Applied Science & Technology Source |
| ISSN: | 0734211X |
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| DOI: | 10.1116/1.583234 |
