A Study of the Electrical Properties of Al[sub 2]O[sub 3] Films Deposited on GaAs Substrates by Spray Pyrolysis.
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| Title: | A Study of the Electrical Properties of Al[sub 2]O[sub 3] Films Deposited on GaAs Substrates by Spray Pyrolysis. |
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| Authors: | Chavez-Ramirez, J., Aguilar-Frutis, M., Garcia, M., Martinez, E., Alvarez-Fregoso, O., Lopez, S., Burillo, G., Falcony, C. |
| Source: | Surface Review & Letters; Oct-Dec2002, Vol. 9 Issue 5/6, p1637, 4p |
| Database: | Applied Science & Technology Source |
| ISSN: | 0218625X |
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| DOI: | 10.1142/S0218625X02004128 |