Complementary metal-oxide-semiconductor compatible athermal silicon nitride/titanium dioxide hybrid micro-ring resonators.
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| Title: | Complementary metal-oxide-semiconductor compatible athermal silicon nitride/titanium dioxide hybrid micro-ring resonators. |
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| Authors: | Qiu, Feng1, Spring, Andrew M.1, Yu, Feng1, Yokoyama, Shiyoshi1 |
| Source: | Applied Physics Letters; 2/4/2013, Vol. 102 Issue 5, p051106, 3p, 2 Graphs |
| Database: | Applied Science & Technology Source |
| ISSN: | 00036951 |
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| DOI: | 10.1063/1.4790440 |