Laser bea m diffraction at the edge of a film and application to thin film metrology.
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| Title: | Laser bea m diffraction at the edge of a film and application to thin film metrology. |
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| Authors: | Do, P. A.1, Touaibia, M.2, Haché, A.1, hachea@umoncton.ca |
| Source: | Applied Optics (1559-128X); 8/20/2013, Vol. 52 Issue 24, p5979-5984, 6p |
| Database: | Applied Science & Technology Source |
| ISSN: | 1559128X |
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| DOI: | 10.1364/AO.52.005979 |
