Determination of the fixed oxide charge and interface trap densities for buried oxide layers formed by oxygen implantation.
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| Title: | Determination of the fixed oxide charge and interface trap densities for buried oxide layers formed by oxygen implantation. |
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| Authors: | Brady, F. T., Li, S. S., Burk, D. E., Krull, W. A. |
| Source: | Applied Physics Letters; 3/14/1988, Vol. 52 Issue 11, p886, 3p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00036951 |
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| DOI: | 10.1063/1.99262 |
