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Determination of the fixed oxide charge and interface trap densities for buried oxide layers formed by oxygen implantation.

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Title: Determination of the fixed oxide charge and interface trap densities for buried oxide layers formed by oxygen implantation.
Authors: Brady, F. T., Li, S. S., Burk, D. E., Krull, W. A.
Source: Applied Physics Letters; 3/14/1988, Vol. 52 Issue 11, p886, 3p
Database: Applied Science & Technology Source
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  Availability: 0
Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 9826210
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: Determination of the fixed oxide charge and interface trap densities for buried oxide layers formed by oxygen implantation.
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  Data: <searchLink fieldCode="JN" term="%22Applied+Physics+Letters%22">Applied Physics Letters</searchLink>; 3/14/1988, Vol. 52 Issue 11, p886, 3p
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    Identifiers:
      – Type: doi
        Value: 10.1063/1.99262
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      – Code: eng
        Text: English
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        PageCount: 3
        StartPage: 886
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      – TitleFull: Determination of the fixed oxide charge and interface trap densities for buried oxide layers formed by oxygen implantation.
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            NameFull: Brady, F. T.
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            NameFull: Li, S. S.
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            NameFull: Burk, D. E.
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            NameFull: Krull, W. A.
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              Text: 3/14/1988
              Type: published
              Y: 1988
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              Value: 52
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              Value: 11
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            – TitleFull: Applied Physics Letters
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