High structural quality epi/oxide boundaries of selective epitaxy grown by SiH4/H2 chemical vapor deposition using growth-sputter cycles.
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| Title: | High structural quality epi/oxide boundaries of selective epitaxy grown by SiH4/H2 chemical vapor deposition using growth-sputter cycles. |
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| Authors: | Yew, Tri-Rung, Reif, Rafael |
| Source: | Applied Physics Letters; 5/21/1990, Vol. 56 Issue 21, p2105, 3p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00036951 |
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| DOI: | 10.1063/1.103232 |
