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A comparative analysis of different measurement techniques to monitor metal and organic contamination in silicon device processing.

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Bibliographic Details
Title: A comparative analysis of different measurement techniques to monitor metal and organic contamination in silicon device processing.
Authors: Polignano, M. L.1, Codegoni, D.1, Grasso, S.1, Mica, I.1, Borionetti, G.2, Nutsch, A.3
Source: Physica Status Solidi. A: Applications & Materials Science. Mar2015, Vol. 212 Issue 3, p495-505. 11p.
Database: Academic Search Ultimate
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