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A graph-theoretic approach for quantification of surface morphology variation and its application to chemical mechanical planarization process.

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Bibliographic Details
Title: A graph-theoretic approach for quantification of surface morphology variation and its application to chemical mechanical planarization process.
Authors: Rao, Prahalad K.1 (AUTHOR), Beyca, Omer F.2 (AUTHOR), Kong, Zhenyu (James)3 (AUTHOR), Bukkapatnam, Satish T. S.4 (AUTHOR) satish@tamu.edu, Case, Kenneth E.5 (AUTHOR), Komanduri, Ranga6 (AUTHOR)
Source: IIE Transactions. Oct2015, Vol. 47 Issue 10, p1088-1111. 24p. 3 Color Photographs, 2 Black and White Photographs, 4 Diagrams, 8 Charts, 5 Graphs.
Database: Academic Search Ultimate
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ISSN:0740817X
DOI:10.1080/0740817X.2014.1001927