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A pre-dispatching vehicle method for a diffusion area in a 300 mm wafer fab.

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Bibliographic Details
Title: A pre-dispatching vehicle method for a diffusion area in a 300 mm wafer fab.
Authors: Huang, Chih-Wei1 (AUTHOR), Lin, James T.1 (AUTHOR) jtlin@ie.nthu.edu.tw
Source: Journal of Industrial & Production Engineering. Dec2016, Vol. 33 Issue 8, p579-591. 13p.
Database: Academic Search Ultimate
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Description
ISSN:21681015
DOI:10.1080/21681015.2016.1174161