Study on the influence of powder size on the properties of BTS/ITO thin film by RF sputtering from powder target.
Saved in:
| Title: | Study on the influence of powder size on the properties of BTS/ITO thin film by RF sputtering from powder target. |
|---|---|
| Authors: | Zhu, GS1,2, Xu, HR1 huaruixu@guet.edu.cn, Li, JJ1, Wang, P1, Zhang, XY1, Chen, YD1, Yan, DL1, Yu, AB3 |
| Source: | Materials Letters. May2017, Vol. 194, p90-93. 4p. |
| Database: | Academic Search Ultimate |
| ISSN: | 0167577X |
|---|---|
| DOI: | 10.1016/j.matlet.2017.02.003 |
