The influence of the operation parameters on the properties of thin films produced by a modified pulsed arc process.
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| Title: | The influence of the operation parameters on the properties of thin films produced by a modified pulsed arc process. |
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| Authors: | Keutel, K.1, Fuchs, H.2, Edelmann, C.1 |
| Source: | Applied Physics A: Materials Science & Processing. 2004, Vol. 78 Issue 5, p687-690. 4p. |
| Database: | Academic Search Ultimate |
| ISSN: | 09478396 |
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| DOI: | 10.1007/s00339-003-2282-6 |